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■ SYSTEM OUTLINE
The Chemiclean-S Series is dry-type exhaust gas processing equipment for
factory mass production use, which various security systems keep for halogen
gas detoxification. We prepare various types corresponding to the needs
of the customer. Security is reliable and this equipment can deal with
various halogen gases or acidic gases by employing a fixation chemical
reaction method.
< Approved device for America and Europe export ( SEMI and CE Certification
Marking ) >
■ SYSTEM FEATURES
< SECURE PROCESSING >
Secure processing by the solidifying chemical reaction method.
< DRY PROCESSING >
No worries about environmental contamination such as water drainage because of its dry process detoxification method.
< EQUIPPED WITH VARIOUS SAFETY MECHANISMS >
Output signal pressure abnormality, temperature abnormality, chemical life etc.
< VARIOUS HALOGEN GASES CAN BE DETOXIFIED >
Detoxifies ClF3, SiF4, WF6, F2, HF, HCl, etc.
< SIMPLE AUTOMATIC OPERATION >
Secure and reliable use is made possible with simple automatic operation.
< RIGHT SIZING >
The Chemiclean-S is a compact piece of equipment which has been optimally downsized, so its small footprint suits your lab.
< HIGH COST PERFORMANCE >
Detoxification ability for a chemical reaction column is high. So you can get a handle on lowering your running cost. |
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