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■ SYSTEM OUTLINE
The Chemiclean-V Series was developed by fully utilizing our company's
unique technology to detoxify PFCs such as (C2F6, CF4, C5F8, C4F6 etc.), and utilizes dry type exhaust gas processing.
We prepare various types corresponding to needs of our customers. Security is reliable and this equipment can deal with various PFC gases by a fixation chemical reaction method.
■ SYSTEM FEATURES
< PROCESSING SECURELY >
Processing securely by the solidifying method chemical reactions.
< VARIOUS PFC AND CO GASES CAN BE DETOXIFIED >
Detoxification of C2F6, CF4, C5F8, C4F6, CHF3, CH2F2, C4F8, C3F8, SF6, etc.
< CO GAS DETOXIFIED >
The Chemiclean-V Series can detoxify CO, the assist gas from Plasma Etching Systems.
< DRY PROCESSING >
Since the detoxification method by this equipment is a simple dry process, the equipment can easily be handled and there is no need to worry about contamination or the discharge of wastewater.
< NO NEED FOR A COMBUSTIBLE GAS SUCH AS LPG OR HYDROGEN >
Because there is no need to use a combustible gas, the unit can be easily installed and safely used.
< EQUIPPED WITH VARIOUS SAFETY MECHANISMS >
Output signal pressure abnormality, temperature abnormality, etc.
< RIGHT SIZING >
The Chemiclean-V is compact equipment, which has been down sized, so it's small footprint fits in your lab. |
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