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■ SYSTEM OUTLINE
Central Engineering has developed the Chemiclean-E Series excimer laser gas purifier to maintain long-term chemical stability of excimer laser gases. Using this process laser gas increases its lifetime, gas cost reduction can be realized, and gas exchange operations can be reduced. The Chemiclean-E Series consists of chemical and physical traps, which remove the impurities in the excimer laser gas. It maintains high gas purity and stable laser oscillation.
■ SYSTEM FEATURES
< LONG GAS LIFETIME >
Long duration laser oscillation is possible, so that operation cost can be reduced.
< GAS COST REDUCTION >
Expensive Ne gas costs can be reduced to the cost level of He gas.
< SAVING OF LABOR >
Operation of the laser beam has become possible for long periods, without the intermittent gas replacement or purify operation.
< DOWN SIZING >
The compact Chemiclean-E series is equipment has been downsized to a small footprint. |
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